Omron D6F Series User Manual

1 D6F-series MEMS Flaw Sensor User’s Manual (A286)
INDEX
1 OUTLINE ........................................................................................................................................ 2
2 WHAT IS A FLOW SENSOR? ....................................................................................................... 2
3 STRUCTURE ................................................................................................................................. 2
3.1 B
ASIC COMPOSITION OF FLOW SENSORS .................................................................................... 2
3.2 F
LOW SENSOR PRODUCT LINEUP .............................................................................................. 3
4 OPERATING PRINCIPLE .............................................................................................................. 4
4.1 B
ASIC STRUCTURE OF MEMS FLOW SENSOR CHIP ..................................................................... 4
4.2 D
ETECTING PRINCIPLE OF MASS FLOW SENSOR .......................................................................... 6
5 PRODUCT FEATURES ................................................................................................................. 7
5.1 CHARACTERISTICS OF FLOW SENSORS ...................................................................................... 7
5.1.1 Detection range of flow sensors ...................................................................................... 8
5.1.2 Output signal (operating characteristics) ......................................................................... 8
5.1.3 Permission pressure performance .................................................................................. 9
5.1.4 Repeatability .................................................................................................................... 9
6 USAGE OF FLOW SENSOR ........................................................................................................ 9
6.1 ELECTRICAL CONNECTION ......................................................................................................... 9
6.2 P
ORT STYLE AND INSTALLATION METHOD .................................................................................. 10
6.2.1 Screw type ..................................................................................................................... 10
6.2.2 Quick fastener type ........................................................................................................ 10
6.2.3 Manifold mount type ....................................................................................................... 11
6.2.4 Bamboo type.................................................................................................................. 12
6.3 A
TTENTION FOR PIPING AND CONNECTION ................................................................................ 13
6.3.1 Cleanup of the inflow gas .............................................................................................. 13
6.3.2 S
tabilization.................................................................................................................... 13
6.3.3 Measurement of high flow ............................................................................................. 13
6.3.4 Consideration of the laminar flow .................................................................................. 14
6.4 T
HE INFLUENCE OF ENVIRONMENT ........................................................................................... 14
6.4.1 Temperature characteristics .......................................................................................... 15
6.4.2 The influence of dust ..................................................................................................... 15
6.4.3 The influence of pressure and temperature .................................................................. 16
6.4.4 The influence of the mounting direction ........................................................................ 16
6.4.5 Output changes in various gases .................................................................................. 17
6.4.6 The behavior in over flow rate range ............................................................................. 17
6.4.7 The influence of humidity .............................................................................................. 17
6.5 A
PPLICATION EXAMPLE ............................................................................................................ 18
7 GLOSSARY ................................................................................................................................. 19
8 WARRANTY AND LIMITED LIABILITY ...................................................................................... 21

Omron D6F Series Specifications

General

Brand	Omron
Model	D6F Series
Category	Accessories
Language	English