7 D6F-series MEMS Flaw Sensor User’s Manual (A286)
5 Product Features
・ Mass Flow Sensing
・ Wide Range Sensing Ability
・ Low Power Consumption
・ Ultra Small Size of MEMS Sensor
5.1 Characteristics of flow sensors
Table3. Representative Specifications Example of Mass Flow Sensor (D6F-□□A1-110)
Flow range*1 0~1 L/min 0~2 L/min
*
:
:
~
Max. 15mA, No load, Vcc=12
~
℃
Output signal
DC1~5V (Non-linear output, Resistive load 10kΩ)
%
℃
*
%
Max. output voltage DC5.7V (Resistive load 10kΩ)
DC0V (Resistive load 10kΩ
)
Absolute maximum supply voltage
Absolute maximum output voltage DC6V
Maximum permission pressure
*
-
~+
℃
(with no ice or no dew condensation)
~
%
RH (with no dew condensation)
-
~+
℃
(with no ice or no dew condensation)
~
%
RH (with no dew condensation)
Temperature characteristics
Within ±3%F.S. of detected characteristics of at 25℃
Over ambient temperature rang -10~+60℃
Min. 20MΩ (DC500, between lead terminal and the base)
AC500V 50/60Hz for one minute between the lead terminals
and the base (Leakage current is 1mA max.)
Weight 12.8g
*1. L/min (Normal) means the volumetric flow rate at 0degC, 101.3kPa. (1 atm)
*2. Use clean and dry gas without a dust and an oil mist.
*3. Reference Value (Typical value)