D6F-series MEMS Flaw Sensor User’s Manual (A286) 8
5.1.1 Detection range of flow sensors
The detection range of Flow Sensors shows the flow rate range of the gas to be detected.
The lower limit voltage is the output at the lower limit and the upper limit voltage is the output
at the upper limit of the detection range. This detection range is based on the condition of
the volumetric flow rate at the reference state (0 ℃ / 101.3kPa).
The detection range of Flow Velocity Sensors (D6F-W, D6F-V) shows the flow velocity range
of the gas to be detected. The lower limit voltage is the output at the lower limit and the
upper limit voltage is the output at the upper limit of the detection range. This flow velocity
range is based on the condition of 25 ℃, 1 01.3kPa.
5.1.2 Output signal (operating characteristics)
Analog type flow sensors increase the output signal voltage with an increase in the flow
rate. The output signal voltage is a non-linear and analog value of DC voltage. As a
representative example of an analog type flow sensor, the output characteristic of
D6F-01A1-110 is shown in Fig.5 and Table 4. This flow rate means a normal volumetric flow
rate on the condition of 0℃, 101.3kPa. These values are measured on the condition of
supply voltage:DC12V±0.1V, ambient temperature:25±5℃, ambient humidity: 35~75%RH.
Operating characteristics / Measurement conditions shown here will vary according to the
type of sensor. Please refer to the operating characteristic information written in the product
catalog or specifications corresponding to the sensor type.
Fig.5 Output signal characteristic
Table4. Representative Example of Operating Characteristics (D6F-01A1-110)
Flow Rate(normal)
(L/min)
Output Voltage (V) 1.00 2.31 3.21 3.93 4.51 5.00
Condition： Supply voltage DC12±0.1V，Ambient temp. 25±5℃, Ambient humidity 35～75％RH
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