Omron D6F Series - Flow Sensor Product Lineup

3 D6F-series MEMS Flaw Sensor User’s Manual (A286)
Fig. 1 Example of Internal Structure of Flow Sensor
3.2 Flow Sensor Product Lineup
OMRON’s flow sensor lineup consists of three categories, Mass flow sensors that output a flow
rate, Flow velocity sensors that output a flow velocity and Differential pressure sensors that can
detect a small pressure drop.
For more information about differential pressure sensors, please refer to the application notes of
MDMK-13-0196.
A flow sensor‘s shape and size will differ depending on the type of gas to be measured, the flow
rate, and the port style. Please refer to the datasheet at the following URL for more information.
http://www.omron.com/ecb/products/search/?cat=5&did=1&prd=mems-flow&lang=en
MEMS Flow Sensor
Mass Flow Sensor
Flow Velocity Sensor
D6F－V□ / －W□ Series
D6F
－
PH Series
Differential Pressure Sensor
D6F
－□
A /
－□
AB /
－□
N /
－□
L /
－
P
□
Series
Driving / Amp. Circuit
MEMS
Flow Chip
Optimizing design of the three
compositional units is important.
Flow Path
(Sensing）
(Heater / Output)