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Pfeiffer Vacuum ASM 310 - Control panel description

Pfeiffer Vacuum ASM 310
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Analyzer cell disassembly
1
2
3
Analyzer cell reassembly
2
1
4 N·m
1 5 3
4 6 2
2
3
Distortion of the measurement results with non-compliant analyzer cell
When it leaves the factory, the analyzer cell is set for the product in which it is installed.
The use of an analyzer cell different from the original component requires settings. Without
these settings, the measurements made by the product are not correct. Only a Pfeiffer Vac-
uum service center can make these settings.
Tightness test after analyzer cell reassembly
Spray a light flow of Helium 4 around the analyzer cell.
Leak rate measured < 3 · 10
-10
mbar·l/s (3 · 10
-11
Pa·m
3
/s).
Service - Maintenance
19/36

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