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TMP-3203MC
Shimadzu TMP-3203MC User Manual
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3.2
Principle of Turb
o Molecular
Pumping
11
Magneti
cally L
evitated T
urbo Mo
lecular
Pump
INSTRUC
TION MANUAL
3
Fig.3-1
Pump Sectional Drawing
(1) High
frequen
cy motor
(6) Spac
er
(11) Inl
et flang
e
(2) Recep
tacle
(7) R
adial mag
neti
c beari
ng
(12) Out
let fl
ange
(3) Dr
ive sh
aft
(8) Axi
al magne
tic be
aring
(13) P
rotect
ive net
(4) Roto
r blad
e
(9) T
ouch-do
wn beari
ng
(14) C
ooli
ng water
pipeli
ne
(5) St
ator
blade
(10)
Gap sen
sor
(pipe
conn
ection
por
t)
①
③
④
⑩
⑭
⑫
⑬
⑪
⑤
⑥
⑨
⑦
②
⑨
⑧
⑩
23
25
Table of Contents
Copyrights and Disclaimers
2
Precautions for Safe Operation
3
Explanation of Label
6
Location of Label
6
Installation Precautions
7
Part Replacement
7
Air Cooled Turbo Molecular Pump
8
Conditional Warranty
8
Scope of the Warranty
8
Warranty of Repaired or Replacement Parts
8
Exemption from the Warranty
8
Disposal of Products and Parts
9
Limitation of Liability
9
Table of Contents
10
Table of Contents
11
Section 1 OUTLINE and DESCRIPTIONS
14
Outline
15
Descriptions
16
Outside Drawing of Pump Main Unit
16
Outside Drawing of Series of TMP-3203
16
Outside Drawing of TMP-3403LMC
18
Standard Accessories
19
Section 2 IDENTIFICATION and FUNCTION
20
Pump Main Unit
21
Pump Construction
23
Principle of Turbo Molecular Pumping
23
Pump Main Unit
27
Specification of Series of TMP-3203
27
Specification of TMP-3403LMC
28
Standards Fulfilled
29
Installation
31
Pump Mounting Direction
31
Installation of the Pump
32
Installation of Series of TMP-3203
34
Installation of TMP-3403LMC
36
Example of Piping Connection
37
Center of Gravity of the Pump
38
Connection of the Pump to the Power Supply Unit
39
Interlock for Vacuum System
40
Outline
43
Introduction
43
Start-Up Preparation
44
Start-Up
44
Start-Up Sequence
44
Shutting down
45
Baking Operation
47
Turbo Molecular Pump Return Request
53
Turbo Molecular Pump Decontamination
54
Touch-Down Bearing Replacement
54
Check of the Rotor Blades
54
Section 9 TROUBLESHOOTING
56
Vacuum Pressure Rise
57
Abnormal Noise And/Or Vibration
57
4
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Shimadzu TMP-3203MC Specifications
General
Brand
Shimadzu
Model
TMP-3203MC
Category
Water Pump
Language
English
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