Shimadzu TMP-3203MC - Page 35

SECTION 5 INSTALLATION
22
263-13236
5
Fig. 5-4 Example of the fixing method using the special washer
Table 5-2 Tightening torque of the fixing bolt
Size of bolt Tightening torque [N•m]
M12
16
～ 26
M16
41
～ 66
Special washer
Inlet flange
Bolt hole
Inlet flange
Special washer
Spring lock washer
Fixing bolt
Vacuum chamber
When shipping After installation