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Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
WARNING
・Fix the pump to the device according to 5.1.2.1 and 5.1.2.2. The method to fix the pump is
different depending on the pump model and the size of inlet flange of the pump.
・The device should be fixed to the floor so as not to move. The device should be designed to
endure the torque 1.5 times the rapid shutdown torque to take the safety margin in
preparation for an emergency accident.
・The rotor assembly of the turbo molecular pump rotates at high speed. Large rapid shutdown
torque should be generated when abnormality occurs in the pump by any chance. Incidental
accident will cause the pump to drop out and to make a catastrophe if the pump is fixed by
insufficient method.
WARNING
Do not remove the turbo molecular pump, before safety has been confirmed.
Improper turbo molecular pump use may be hazardous to operator's health in applications not
recommended or approved by Shimadzu. In the event removal of the turbo molecular pump from
an application is required, full protective measures including purging of the turbo molecular pump
with an inert gas and/or apparel are recommended when the turbo molecular pump has been
used in applications that required the use of corrosive, reactive, stimulative, or toxic gases.
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