Index
Index-1
Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
263-13236
Index
B
backing vacuum pump ...................... 8、14、15、24
C
CE MARKING ........................................................ 16
Cooling fan ........................................................vi
、vii
cooling water .....................................................8
、25
corrosive gas ......................................................... 41
G
gap sensor ............................................................. 10
gas purge ........................................ 14
、15、36、37
I
inlet flange ........................................................8、11
O
outlet flange ......................................................8、11
overhaul ................................................................. 40
P
port for gas purge .................................................... 8
R
rapid shutdown torque ........................................... 23
rotor ................................................................10
、11
S
SEMI F47 ............................................................... 16
SEMI S2 ................................................................. 16
T
touch-down bearing ........................................11、41
U
UL .......................................................................... 16
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