SMC Networks PF2M7 Series Manual

Series
1 2 0.1 0.3 0.5 5 10 20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000
Rated flow range [L/min]
0.01
0.02
0.05
−0.5 0.5
Series
Detection
method
Applicable
fluid
Smallest
settable
increment
Detection
method
Applicable
fluid
Thermal
type
(MEMS)
Thermal
type
(MEMS)
Dry air
N
2
Dry air
N2
Ar
CO2
Dry air
N2
0.1
L/min
0.5
L/min
1
L/min
2
L/min
5
L/min
2
L/min
5
L/min
10
L/min
Thermal
type
(MEMS)
Bypass
flow type
Thermal
type
(Thermistor)
Air
N2
—
—
Thermal
type
(Platinum
sensor)
Bypass
flow type
Air
N2
0.1
L/min
0.01
L/min
0.001
L/min
1
L/min
Dry air
N
2
Thermal
type
(MEMS)
Bypass
flow type
1
L/min
1 2 3−3 −2 −1 −0.5 0 0.5
Rated flow range [L/min]
PFMV
PF2M7(-L)
PFG300
PFG300
PF2A
PF3A7H
PFMB
PFMC
−1
−3
1
0 1
0 3
3
0 0.5
Compatibility with the
PFG300 digital flow monitor
PFG300
Flow Switch Flow Rate Variations
0.5
1
0.1
0.02
0.05
0.01
0.3
2
5
10
20
5
10
20
1
2
10
25
50
200
500
1000
2000
100
500
1000
2000
1
5
10
20
50
30
60
120
10
50
100
200
500
3000
6000
12000
5
5

SMC Networks PF2M7 Series Specifications

General

Brand	SMC Networks
Model	PF2M7 Series
Category	Switch
Language	English