Ulvac DIS-252 - Table of Contents; Contents

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Contents
Important information ................................................................................................................. 1
For safe operation ....................................................................................................................... 2
Contents ....................................................................................................................................... 7
1. Before use ................................................................................................................................ 8
1.1 Check the product ............................................................................................................. 8
2. Name and structure of each section ................................................................................... 10
3. Installation .............................................................................................................................. 11
3.1 Wiring ................................................................................................................................ 13
3.2 Test operation .................................................................................................................. 17
3.3 Connection to vacuum system (chamber) .................................................................... 18
4. Operation ................................................................................................................................ 19
4.1 Air-flush closed operation .............................................................................................. 21
4.1.1 Start-up ...................................................................................................................... 21
4.1.2 Shut-down .................................................................................................................. 22
4.2 Air-flush opened operation ............................................................................................. 22
4.2.1 Preparation ................................................................................................................ 23
4.2.2 Start-up and shut-down ............................................................................................ 23
4.2.3 Returning to air-flush closed operation ................................................................. 24
5. Maintenance and inspection ................................................................................................ 25
5.1 Daily maintenance and inspection ................................................................................ 25
5.2 Maintenance ..................................................................................................................... 26
6. Problems and remedies ........................................................................................................ 27
7. Disposal .................................................................................................................................. 27
8. Specifications ........................................................................................................................ 28
8.1 Specifications .................................................................................................................. 28
8.2 Dimensions ...................................................................................................................... 29
8.3 Performance data ............................................................................................................ 29
9. Warranty and After-sales service ........................................................................................ 31
9.1 Warranty ........................................................................................................................... 31
9.2 After-sales and service ................................................................................................... 31
Usage Checklist ......................................................................................................................... 32