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4.2.1 Preparation
Before starting air-flush operation, first stop vacuum pump and proceed in
accordance with the following procedure. Never try to do air-flush operation during
operation.
Fit air-muffler
①
Stop vacuum pump.
②
Remove plug from air-flush port with a spanner (nominal dia. 13mm).
③
Lightly fit the attached air-muffler to air-flush port.
※
Store the removed plug and do not misplace it.
4.2.2 Start-up and shut-down
①
Start vacuum pump according to 4.1.1 Start-up [page 21].
②
Stop vacuum pump according to 4.1.2 Shut-down[page 22].
Important
Continuous evacuating of humid gas
When evacuating vacuum chamber while humidity in chamber is high, moisture volume drawn into pump differs
according to temperature and pressure in chamber.
When pumping vacuum chamber containing humid gas, be sure to open air-flush port and operate pump (air-
flush opened operation).
Be careful not to damage air-flush port (especially air-muffler section).
Damage to air-flush port can cause failure.
When doing air-flush opened operation
Noise level will increase (by 7~8dB).
Install pump in an area which is not exposed to debris such as iron powder, stone powder,
polish powder or wood dust.
Debris can clog air-muffler, undercutting air-flush effect.
Be sure to close isolation valve between vacuum pump and vacuum chamber during pump
shut-down.
If vacuum pump stops during air-flush opened operation, atmospheric air is drawn back from air-flush port to
inside of vacuum pump, and vacuum on chamber side cannot be maintained. Be sure to close isolation valve
between vacuum pump and vacuum chamber to prevent the drawback of debris from vacuum pump into vacuum
chamber before stopping vacuum pump.
When operating with air-flush OFF (closed), operate as per 4.2.3[page 24].
Air-flush port
Fit air-muffler
Remove plug
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