Ulvac DIS-252 - Name and Structure of each Section

 -10-
Hour
c
ounter
Motor
Turning
d
irection
p
late
Inlet NW
25
Out
let NW
16
Air flush port(Rc1/8)
(It is closed by plug when shipping from factory.)
Handle
2. Name and structure of each section
Structure of vacuum pump
Cooling
f
an
Orbiting scroll OS
Fixed scroll FS(2)
Fixed scroll FS(1)
Fan
c
over
Cooling
f
an