Ulvac DIS-252 - Operation

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4. Operation
Be sure to use the procedure below to start up or shut down the pump.
・ When you do not use air-flush device,
proceed 4.1 Air-flush closed operation [page 21].
・
When you use air-flush device,
proceed 4.2 Air-flush opened operation [page 22].
WARNING
Danger of explosion and ignition
Do not evacuate gas which is hazardous to humans or explosive, flammable, or
corrosive. Do not evacuate any gas with substances containing chemicals,
solvents, and powders.
If done, it can cause failure or injury by gas, explosion or ignition.
※
When evacuating vapor, operate in accordance with 4.2 [page 22].
Never evacuate
hazardous gas
Danger of entanglement and foreign objects dispersal
Never put finger or foreign objects into air hole of fan cover, air hole of motor or
clearance between FS(1) and FS(2) cooling fins.
If done, it can cause injury from entanglement with turning section, or foreign objects
dispersal.
Avoid foreign
objects
Danger of electric shock and entanglement
Do not remove or modify safeguards or insulation parts.
If done, it can cause injury from electric shock or turning section and it can cause
deteriorated performance and operating lifetime, and invalidate guarantee.
Never make any
modifications
Danger of failure and injury
Change air-flush port only after vacuum pump is stopped.
If you change it during vacuum pump operation, it can cause vacuum pump failure and
injury.
Change after
vacuum pump is
stopped
D
IS
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2
Finger, foreign objects
Finger, foreign objects
Clearance between FS(1) and FS(2)
cooling fins
Air hole of fan cover
Air hole of motor