-20-
CAUTION
Danger of exhaust disruption
Remove blank flange from inlet and outlet.
Operation with blank flange being fitted can disrupt exhaust or cause blank flange to fly
by exhaust impetus, resulting in accident, failure, or injury from contact with flying
objects.
Remove blank
flange
Danger of vacuum break and pollution
Be sure to close isolation valve between vacuum pump and vacuum system
(chamber) during start-up and stop.
Start-up or stop with isolation valve in the open position can draw back gas and debris
attached to inside of vacuum pump to vacuum chamber due to pressure differential,
resulting in vacuum break and pollution on vacuum chamber side.
Start or stop after
closing isolation
valve
Danger of abnormal sound and failure
Open inlet to atmosphere for about 5 seconds before restarting vacuum pump.
If not, it can unbalance temperature inside vacuum pump, resulting in failure.
Op en ai r in le t
Danger of exceeding permissible temperature of intake gas
If intake gas temperature is over 50
℃
, be sure to install a chiller or trap
between vacuum pump and vacuum chamber so that gas intake temperature of
vacuum pump keeps below 50
℃
.
If not, vacuum pump temperature can increase, resulting in failure.
Be wa re
te mp era tu re o f
in ta ke ga s
Danger of remaining moisture
When evacuating moisture, be sure to open air-flush port (air-flus opened
operation).
If you evacuate vapor while air-flush port is closed, condensed water will remain inside
vacuum pump and cause failure.
Operate the unit while
opening air-flush port
Danger of insufficient vapor exhaust
After evacuating vapor, do air-flush opened operation for at least one hour.
If you close air-flush port or stop vacuum pump soon after evacuating vapor, condensed
moisture will remain inside vacuum pump, which will cause failure.
Caution after
exhausting vapor
Danger of exceeding permissible intake gas volume
When sending
N
2
gas or dry air into air-flush port, pressure should be the same
as atmospheric pressure and flow rate should be less than 10L/min.
If not, it can increase pressure inside vacuum pump, resulting in failure.
Beware of intake
gas volume
Risk of motor malfunction
Refrain from frequent start/stop operation.
It induces malfunction of motor such as burn out.
Please consult your distributor or factory representative for details.
Appropriate operating mode with adequate intervals and frequency of start/stop is varies
owing to operating conditions.
Caution for frequent
start/stop and short
interval
Danger of human body parts contacting vacuum
At starting up of the vacuum pump and during operation, be careful not to enter
human body into the inlet.
You can cause injury to people and damage to equipment.
Prevent human
body from
contacting
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