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4.2.3 Returning to air-flush closed operation
Before starting air-flush operation, first stop vacuum pump and proceed in
accordance with the following procedure. Never perform this procedure during
operation.
Remove air-muffler
①
Stop vacuum pump.
②
Remove air muffler from air-flush port.
③
Lightly fit plug to air-flush port with a spanner (nominal dia. 13mm).
※
When restarting air-flush operation, refer to 4.2.1~4.2.2[page 23] and prepare and
start.
※
Store removed air muffler and pay attention not to misplace it.
Air-flush port
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