Ulvac DIS-252 - Connection to Vacuum System (Chamber)

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in reverse.
In that case, stop vacuum pump, turn off main electrical source and change 2 out
of 3 cords of electric source connection and change turning direction to correct
one.
If you install pump to vacuum system and control operation of vacuum pump by
remove control,
first check pump itself for turning direction and then install it
to vacuum system.
3.3 Connection to vacuum system (chamber)
Inlet is NW25 and outlet is NW16.
CAUTION
Danger of exhaust disruption
When connecting exhaust piping to vacuum pump and when combining piping
with another vacuum pump, pay attention to piping size and length so that it does
not cause exhaust resistance.
Exhaust resistance can disrupt air flow, resulting in failure and over-current.
Pay attention to
exhaust resistance
Important
Use isolation valve between vacuum system and inlet.
Isolation valve is necessary to prevent the drawback of debris attached to the inside of vacuum pump into the
vacuum chamber during start-up and shut-down (We also recommend the use of leak valve). We recommend the
use of an
automatic valve as the isolation valve which closes during power failure in order to prevent the
drawback of debris inside pump into the vacuum chamber.
Use an appropriate and clean connecting pipe between vacuum chamber and vacuum pump.
Use the clean connecting pipe between vacuum chamber and vacuum pump.
We recommend the use of a flexible tube between the inlet of vacuum pump and vacuum chamber so that
vibration of the vacuum pump can be isolate.
When connecting exhaust piping to the outlet of vacuum pump, refer to the following
instructions.
Never exceed 5-meter in length in straight line when extending exhaust pipe. The pipe size should be no smaller
than
NW16 (inner dia.16 mm)
When longer extension of exhaust piping is required, adopt larger exhaust pipe size.
Make sure that exhaust piping is not clogged during pump operation.
Make sure that pressure at outlet does not exceed atmospheric pressure at any conditions.
In order to keep condensation away from feeding into the exhaust port, take proper measure.
It causes exhaust disturbance. Drain condensations periodically by using valve separately arranged.
Important
Vacuum pump turns clockwise when viewed from motor side.
Check that air comes out from outlet.
If pump turns counter-clockwise, stop vacuum pump, turn off electrical source and change 2
out of 3 cords of electrical source connection.
Drain
condensation
Chamber
Isolation valve
(Automatic valve)
Leak
valve
Vacuum pump
Outlet duct
Inlet Outlet