Ulvac DIS-252 - Page 7

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For safe operation
WARNING
Protect cable
from being
pulled
Danger of short-circuit and
electric shock
The power-supply conductor shall be free
from strain including twisting by using
cord anchorage, which is specified by the
local electrical wiring regulation.
If not, it can cause short-circuit fire or
injury from electric shock.
Be sure to
ground
Danger of electric shock
Connect earth cord to earth terminal in
motor terminal box.
If not, it can cause injury from electric
shock.
With a thermal
protector [Only
single-phase
motor]
Danger of restart
Be sure to switch off electric source
before maintenance or inspection.
Single-phase motor has a thermal
protector.
Vacuum pump restarts become cool
without warning after vacuum pump.
.
Never evacuate
hazardous gas
Danger of explosion and ignition
Do not evacuate gas which is hazardous
to humans or explosive, flammable, or
corrosive. Do not evacuate any gas with
substances containing chemicals,
solvents, and powders.
If done, it can cause failure or injury by
gas, explosion or ignition.
Avoid foreign
objects
Danger of entanglement and
foreign objects dispersal
Never put finger or foreign objects into
air hole of fan cover, air hole of motor or
clearance between FS(1) and FS(2)
cooling fins.
If done, it can cause injury from
entanglement with turning section, or
foreign objects dispersal.
Never make any
modifications
Danger of electric shock and
entanglement
Do not remove or modify safeguards or
insulation parts.
If done, it can cause injury from electric
shock or turning section and it can cause
deteriorated performance and operating
lifetime, and invalidate guarantee.
Change after
vacuum pump is
stopped
Danger of failure and injury
Change air-flush port only after vacuum
pump is stopped.
If you change it during vacuum pump
operation, it can cause vacuum pump
failure and injury.
Conduct
periodical
maintenance and
inspection
Danger of failure and injury
Conduct periodical maintenance and
inspection.
If not, it can cause insufficient
performance, failure of vacuum pump,
and injury.
Be careful about
high temperature
Danger of burns
Conduct maintenance and inspection only
after vacuum pump becomes cool
enough.
Maintenance and inspection soon after
vacuum pump stops can cause burn
injury.
Turn off electric
source
Danger of electric shock
Be sure to conduct maintenance and
inspection after you turn off electric
source.
If not, it can cause injury from electric
shock or turning object.
Ask specialist to
perform repairs
Danger of accident, failure and
shorter operating lifetime
Ask specialist to perform repairs.
Defective repairs can cause accident,
failure or shorter operating lifetime.