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General| Electron Source | Schottky field emission gun |
|---|---|
| Ion Source | Gallium liquid metal ion source (LMIS) |
| Accelerating Voltage (SEM) | 0.1 kV to 30 kV |
| Accelerating Voltage (FIB) | 0.5 kV to 30 kV |
| Magnification | Up to 1, 000, 000x |
| Stage | Motorized stage |
| Maximum Sample Size | 100 mm diameter |
| Vacuum System | High vacuum |
| Detectors | In-lens SE detector |
| FIB Column | High current FIB column |
| FIB Current | 1 pA to 65 nA |
| Beam Current | Up to 100 nA |
| Chamber | Large chamber with multiple ports for detectors and accessories |
| Gas Injection System | Yes |
| Software | ZEN |
| Type | Focused Ion Beam - Scanning Electron Microscope (FIB-SEM) |
Covers safety procedures, hazard prevention, and safety equipment for safe operation.
Details essential parts including vacuum, electron/ion columns, detectors, and stage.
Details the SmartSEM software, its user interface, and program suite.
Describes the procedures for energizing and starting the microscope and SmartSEM software.
Guides on acquiring images, modifying gun parameters, and setting up detectors.
Details procedures for safely shutting down the microscope and performing emergency shutdowns.
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