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Zeiss Crossbeam 350 - User Manual

Zeiss Crossbeam 350
126 pages
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Instruction Manual
ZEISS Crossbeam 350
Focused Ion Beam - Scanning Electron Microscope (FIB-SEM)

Table of Contents

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Summary

Glossary

General Information

Text Conventions and Link Types

Explains text conventions and link types used in the manual.

Explanation on Warnings and Additional Information

Details signal words, symbols, and their meanings for hazards.

Further Applicable Documents

Lists related manuals and documentation for further reference.

Contact

Provides contact information for ZEISS headquarters and service.

Safety

Intended Use

Describes the intended applications and operational limits of the microscope.

Safety Procedures

Outlines requirements for safe operation, personnel, and maintenance.

Prevention of Hazards

Summarizes potential hazards and recommended safety precautions.

Safety Equipment

Details safety features like cover panels, main switch, and EMO button.

Product and Functional Description

System Overview

Provides an overview of the main components of the workstation.

Main Components

Describes key hardware components like the vacuum system and columns.

Optional Components and Accessories

Lists and describes optional detectors and accessories available for the system.

Software Description

SmartSEM

Describes the SmartSEM GUI, its elements, and graphical controls.

SmartFIB

Details the SmartFIB GUI, its elements, and graphical controls.

Installation

Operation

Starting the System

Step-by-step guide for energizing and starting the microscope and software.

Obtaining a First Image

Basic procedures for acquiring an initial image using the SE detector.

Modifying Gun Parameters

Explains how to select gun modes and adjust probe current.

Working with Different Aperture Configurations and Beam Modes

Details how to select apertures and column modes for optimal results.

Finding Appropriate Detector Settings

Guides on selecting and setting up various detectors for optimal imaging.

Working with Variable Pressure

Explains how to use the Variable Pressure (VP) mode for specific samples.

Shutting down the System

Procedures for finishing work sessions and shutting down the system.

Performing an Emergency Shutdown

Instructions for emergency shutdown in critical situations.

Maintenance and Repair

Maintenance Work

Describes the scope of preventive maintenance performed by ZEISS.

Maintenance Intervals

Outlines the recommended intervals for device maintenance.

Change of Consumables and Chemicals

Lists consumables and chemicals that require periodic replacement.

Troubleshooting

Overview

Provides a table of common problems, causes, and suggested measures.

Overall System

Addresses issues related to the overall system and CAN communication.

Chamber

Covers troubleshooting for chamber-related issues like stage initialization.

Column

Addresses troubleshooting for column-related issues like bakeout.

Power Circuit

Details checks for circuit breakers and potential electrical problems.

Detectors

Discusses maintenance for detector components, like lubrication.

Focused Ion Beam

Covers troubleshooting for the FIB column, such as ion source issues.

Shutdown and Disposal

Putting the Microscope out of Operation

Procedures for putting the microscope out of operation for extended periods.

Transport and Storage

Guidelines for safe transport and storage of the microscope and its components.

Disposal

Instructions for disposing of consumables and the microscope unit.

Technical Data and Conformity

Product Specification

Provides detailed technical specifications for electron optics and FIB column.

Installation Requirements

Lists requirements for location, electrical supplies, and environmental conditions.

Declaration of Conformity

States compliance with EC Directives and harmonized standards.

Parts and Tools

Consumables

Lists parts and tools classified as consumables with their part numbers.

Spare Parts

Lists spare parts available for replacement, including part numbers.

Tools and Accessories

Lists necessary tools and accessories for operating and maintaining the system.

Summary

Glossary

General Information

Text Conventions and Link Types

Explains text conventions and link types used in the manual.

Explanation on Warnings and Additional Information

Details signal words, symbols, and their meanings for hazards.

Further Applicable Documents

Lists related manuals and documentation for further reference.

Contact

Provides contact information for ZEISS headquarters and service.

Safety

Intended Use

Describes the intended applications and operational limits of the microscope.

Safety Procedures

Outlines requirements for safe operation, personnel, and maintenance.

Prevention of Hazards

Summarizes potential hazards and recommended safety precautions.

Safety Equipment

Details safety features like cover panels, main switch, and EMO button.

Product and Functional Description

System Overview

Provides an overview of the main components of the workstation.

Main Components

Describes key hardware components like the vacuum system and columns.

Optional Components and Accessories

Lists and describes optional detectors and accessories available for the system.

Software Description

SmartSEM

Describes the SmartSEM GUI, its elements, and graphical controls.

SmartFIB

Details the SmartFIB GUI, its elements, and graphical controls.

Installation

Operation

Starting the System

Step-by-step guide for energizing and starting the microscope and software.

Obtaining a First Image

Basic procedures for acquiring an initial image using the SE detector.

Modifying Gun Parameters

Explains how to select gun modes and adjust probe current.

Working with Different Aperture Configurations and Beam Modes

Details how to select apertures and column modes for optimal results.

Finding Appropriate Detector Settings

Guides on selecting and setting up various detectors for optimal imaging.

Working with Variable Pressure

Explains how to use the Variable Pressure (VP) mode for specific samples.

Shutting down the System

Procedures for finishing work sessions and shutting down the system.

Performing an Emergency Shutdown

Instructions for emergency shutdown in critical situations.

Maintenance and Repair

Maintenance Work

Describes the scope of preventive maintenance performed by ZEISS.

Maintenance Intervals

Outlines the recommended intervals for device maintenance.

Change of Consumables and Chemicals

Lists consumables and chemicals that require periodic replacement.

Troubleshooting

Overview

Provides a table of common problems, causes, and suggested measures.

Overall System

Addresses issues related to the overall system and CAN communication.

Chamber

Covers troubleshooting for chamber-related issues like stage initialization.

Column

Addresses troubleshooting for column-related issues like bakeout.

Power Circuit

Details checks for circuit breakers and potential electrical problems.

Detectors

Discusses maintenance for detector components, like lubrication.

Focused Ion Beam

Covers troubleshooting for the FIB column, such as ion source issues.

Shutdown and Disposal

Putting the Microscope out of Operation

Procedures for putting the microscope out of operation for extended periods.

Transport and Storage

Guidelines for safe transport and storage of the microscope and its components.

Disposal

Instructions for disposing of consumables and the microscope unit.

Technical Data and Conformity

Product Specification

Provides detailed technical specifications for electron optics and FIB column.

Installation Requirements

Lists requirements for location, electrical supplies, and environmental conditions.

Declaration of Conformity

States compliance with EC Directives and harmonized standards.

Parts and Tools

Consumables

Lists parts and tools classified as consumables with their part numbers.

Spare Parts

Lists spare parts available for replacement, including part numbers.

Tools and Accessories

Lists necessary tools and accessories for operating and maintaining the system.

Zeiss Crossbeam 350 Specifications

General IconGeneral
Accelerating Voltage (SEM)0.1 - 30 kV
Accelerating Voltage (FIB)0.5 - 30 kV
Max Stage Load5 kg
TypeFocused Ion Beam - Scanning Electron Microscope (FIB-SEM)
Electron SourceSchottky field emitter
Ion SourceLiquid Metal Ion Source (LMIS), Ga+
Stage TypeMotorized stage
DetectorsBSE
Maximum Sample Size100 mm diameter, 45 mm height

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