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Zeiss Crossbeam 550L - User Manual

Zeiss Crossbeam 550L
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Instruction Manual
ZEISS Crossbeam 550L, Crossbeam 550
Focused Ion Beam - Scanning Electron Microscope (FIB-SEM)

Table of Contents

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Summary

General Information

Text Conventions and Link Types

Defines text conventions and link types used in the manual.

Warnings and Additional Information

Explains warning symbols and additional information provided in the manual.

Further Applicable Documents

Lists related documents for further information and details.

Contact Information

Provides contact details for ZEISS support and service.

Safety

Intended Use

Defines the intended applications and scope of the microscope.

Safety Procedures

Outlines essential procedures for safe operation and maintenance.

Hazard Prevention

Details potential hazards and recommended safety precautions.

Safety Equipment and Labels

Describes safety features, equipment, and labels on the microscope.

Product and Functional Description

System Overview

Provides a general overview of the system components and accessories.

Main Components

Details the key parts of the system, including vacuum and electron optics.

Electron Optical Column | Gemini II

Details the core SEM column and its optics.

Focused Ion Beam (FIB) Column

Details the optional FIB column and its functionality.

Product and Functional Description

Detectors

Describes the various detectors used for signal acquisition.

Specimen Stage

Describes stage operation, axes, and navigation.

Dual Joystick

Describes the control interface for stage and specimen navigation.

Optional Components and Accessories

Lists and describes optional detectors and control panel features.

Software Description

SmartSEM

Details the SmartSEM software interface, controls, and features.

User Access Levels and User Privileges

Explains user access levels and their associated privileges for system operation.

SmartSEM Program Suite

Lists programs and utilities within the SmartSEM suite for microscopy.

SmartFIB

Details the SmartFIB software interface and its graphical control elements.

Installation

Operation

Starting the System

Provides step-by-step instructions for energizing and starting the microscope.

Obtaining a First Image

Guides users through the process of acquiring an initial image.

Modifying Gun Parameters

Explains how to adjust gun modes, probe current, and extractor voltage.

Aperture Configurations and Beam Modes

Discusses different aperture configurations and beam modes for optimal imaging.

Operation

Finding Appropriate Detector Settings

Provides guidance on selecting and setting up various detectors for optimal results.

Setting up the InLens SE Detector

Details the setup for the InLens SE detector for surface topography.

Setting up the SE Detector

Details the setup for the SE detector to highlight specimen topography.

Setting up the EsB Detector

Details the setup for the EsB detector for material contrast analysis.

Operation

Setting up the SESI Detector

Details the setup for the SESI detector for secondary electron and ion imaging.

Setting up the aBSD;BSD Detector

Details the setup for aBSD/BSD detectors for material and topographic imaging.

Setting up the aSTEM;STEM Detector

Details the setup for aSTEM/STEM detectors for compositional and topographic imaging.

Setting up the CL Detector

Details the setup for the CL detector for material science applications.

Operation

Shutting down the System

Provides procedures for safely shutting down the microscope.

De-energizing the Microscope

Details the steps for completely de-energizing the microscope.

Emergency Shutdown

Outlines the procedure for performing an emergency shutdown of the system.

Maintenance and Repair

Maintenance Work

Lists the types of preventive maintenance performed by service representatives.

Maintenance Intervals

Specifies the recommended intervals for performing maintenance tasks.

Consumables and Chemicals

Details the consumables and chemicals that require periodic replacement.

Troubleshooting

Overview

Provides a table of common problems, causes, and remedies.

Overall System

Addresses issues related to the overall system and CAN communication.

Chamber

Covers troubleshooting for chamber-related issues like stage and door seals.

Column

Addresses troubleshooting for column-related issues like gun head bakeout.

Troubleshooting

Calibrating the Probe Current

Explains how to calibrate the probe current for accurate measurements.

Power Circuit

Covers troubleshooting related to the power circuit and circuit breakers.

Detectors

Details troubleshooting steps for various detectors, including lubrication.

Focused Ion Beam

Addresses troubleshooting for the FIB system, including ion source issues.

Shutdown and Disposal

Putting the Microscope out of Operation

Instructions for taking the microscope out of service for extended periods.

Transport and Storage

Guidelines for safely transporting and storing the microscope.

Disposal

Procedures for the responsible disposal of consumables and the microscope.

Technical Data and Conformity

Product Specification

Provides detailed technical specifications for the microscope's electron optics and components.

Installation Requirements

Outlines the necessary site and environmental requirements for installation.

Layout and Connections

Illustrates the system layout and connection points for various components.

System Layout

Shows the physical dimensions and footprint of the microscope system.

Technical Data and Conformity

Declaration of Conformity

States the machine's compliance with relevant EC directives and standards.

Parts and Tools

Consumables

Lists required consumables and their part numbers for maintenance.

Spare Parts

Lists essential spare parts and their part numbers for repairs.

Tools and Accessories

Lists necessary tools and accessories for operating and maintaining the microscope.

Summary

General Information

Text Conventions and Link Types

Defines text conventions and link types used in the manual.

Warnings and Additional Information

Explains warning symbols and additional information provided in the manual.

Further Applicable Documents

Lists related documents for further information and details.

Contact Information

Provides contact details for ZEISS support and service.

Safety

Intended Use

Defines the intended applications and scope of the microscope.

Safety Procedures

Outlines essential procedures for safe operation and maintenance.

Hazard Prevention

Details potential hazards and recommended safety precautions.

Safety Equipment and Labels

Describes safety features, equipment, and labels on the microscope.

Product and Functional Description

System Overview

Provides a general overview of the system components and accessories.

Main Components

Details the key parts of the system, including vacuum and electron optics.

Electron Optical Column | Gemini II

Details the core SEM column and its optics.

Focused Ion Beam (FIB) Column

Details the optional FIB column and its functionality.

Product and Functional Description

Detectors

Describes the various detectors used for signal acquisition.

Specimen Stage

Describes stage operation, axes, and navigation.

Dual Joystick

Describes the control interface for stage and specimen navigation.

Optional Components and Accessories

Lists and describes optional detectors and control panel features.

Software Description

SmartSEM

Details the SmartSEM software interface, controls, and features.

User Access Levels and User Privileges

Explains user access levels and their associated privileges for system operation.

SmartSEM Program Suite

Lists programs and utilities within the SmartSEM suite for microscopy.

SmartFIB

Details the SmartFIB software interface and its graphical control elements.

Installation

Operation

Starting the System

Provides step-by-step instructions for energizing and starting the microscope.

Obtaining a First Image

Guides users through the process of acquiring an initial image.

Modifying Gun Parameters

Explains how to adjust gun modes, probe current, and extractor voltage.

Aperture Configurations and Beam Modes

Discusses different aperture configurations and beam modes for optimal imaging.

Operation

Finding Appropriate Detector Settings

Provides guidance on selecting and setting up various detectors for optimal results.

Setting up the InLens SE Detector

Details the setup for the InLens SE detector for surface topography.

Setting up the SE Detector

Details the setup for the SE detector to highlight specimen topography.

Setting up the EsB Detector

Details the setup for the EsB detector for material contrast analysis.

Operation

Setting up the SESI Detector

Details the setup for the SESI detector for secondary electron and ion imaging.

Setting up the aBSD;BSD Detector

Details the setup for aBSD/BSD detectors for material and topographic imaging.

Setting up the aSTEM;STEM Detector

Details the setup for aSTEM/STEM detectors for compositional and topographic imaging.

Setting up the CL Detector

Details the setup for the CL detector for material science applications.

Operation

Shutting down the System

Provides procedures for safely shutting down the microscope.

De-energizing the Microscope

Details the steps for completely de-energizing the microscope.

Emergency Shutdown

Outlines the procedure for performing an emergency shutdown of the system.

Maintenance and Repair

Maintenance Work

Lists the types of preventive maintenance performed by service representatives.

Maintenance Intervals

Specifies the recommended intervals for performing maintenance tasks.

Consumables and Chemicals

Details the consumables and chemicals that require periodic replacement.

Troubleshooting

Overview

Provides a table of common problems, causes, and remedies.

Overall System

Addresses issues related to the overall system and CAN communication.

Chamber

Covers troubleshooting for chamber-related issues like stage and door seals.

Column

Addresses troubleshooting for column-related issues like gun head bakeout.

Troubleshooting

Calibrating the Probe Current

Explains how to calibrate the probe current for accurate measurements.

Power Circuit

Covers troubleshooting related to the power circuit and circuit breakers.

Detectors

Details troubleshooting steps for various detectors, including lubrication.

Focused Ion Beam

Addresses troubleshooting for the FIB system, including ion source issues.

Shutdown and Disposal

Putting the Microscope out of Operation

Instructions for taking the microscope out of service for extended periods.

Transport and Storage

Guidelines for safely transporting and storing the microscope.

Disposal

Procedures for the responsible disposal of consumables and the microscope.

Technical Data and Conformity

Product Specification

Provides detailed technical specifications for the microscope's electron optics and components.

Installation Requirements

Outlines the necessary site and environmental requirements for installation.

Layout and Connections

Illustrates the system layout and connection points for various components.

System Layout

Shows the physical dimensions and footprint of the microscope system.

Technical Data and Conformity

Declaration of Conformity

States the machine's compliance with relevant EC directives and standards.

Parts and Tools

Consumables

Lists required consumables and their part numbers for maintenance.

Spare Parts

Lists essential spare parts and their part numbers for repairs.

Tools and Accessories

Lists necessary tools and accessories for operating and maintaining the microscope.

Zeiss Crossbeam 550L Specifications

General IconGeneral
BrandZeiss
ModelCrossbeam 550L
CategoryMicroscope
LanguageEnglish

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