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The vacuum system creates the high vacuum (low pressure) required for the MSD to
operate. Without this vacuum, the molecular mean free path is too short.
Ions cannot travel from the ion source through the mass filter to the electron multiplier
(detector) without colliding with other molecules.
The main components of the vacuum system are:
• Vacuum manifold
• Foreline gauge
• Calibration valve
• Gauge controller (optional)
• Vacuum seals
• Foreline pump and/or trap
• Diffusion/turbo pump and fan
• High vacuum gauge tube
Vacuum Systems and Pumps
Keeping a pan under the vacuum pump helps to detect and identify
the origin of oil leaks.
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