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TriScroll 800 Inverter Vacuum Pump
Table of Contents
Warranty ....................................................................vii
Warranty Replacement and Adjustment...............vii
Instructions for Use ..................................................... 1
General Information ................................................. 1
Storage ................................................................. 1
Unpacking and Inspection........................................ 1
Installation Requirements ......................................... 2
Safety ................................................................... 2
Mechanical Connections.......................................... 4
Pump Location ..................................................... 4
Vacuum Pump Isolation Valve.............................. 4
Pump Inlet............................................................ 4
Pump Exhaust....................................................... 4
Gas Ballast ........................................................... 4
Bearing Purge ....................................................... 4
Operation................................................................. 5
Startup Procedure................................................. 5
Shutdown Procedure ............................................ 5
Maintenance ............................................................ 5
TriScroll 800 Inverter Pump Components View ........ 6
Technical Information ................................................. 7
Pump Electrical Controller........................................ 9
Technical Specifications ....................................... 9
Serial Interface Specification RS485 and RS232.. 10
Purge Kit ................................................................ 12
Exhaust Silencer Kit ................................................ 12
Vibration Isolation Kit............................................. 12
HEPA Inlet filter...................................................... 12
Troubleshooting ..................................................... 13
Maintenance .......................................................... 14
General Information ........................................... 14
Related TriScroll Manuals................................... 14
Maintenance and Tooling Kits ............................ 14
Factory Service Options...................................... 15
Accessories......................................................... 15
Contacting Agilent.............................................. 15
Request for Return Health and Safety Certification
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