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Agilent Technologies X3502-64170

Agilent Technologies X3502-64170
342 pages
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Contents
12/342 TwisTorr 74 FS User Manual / 87-901-053-01
16
Instructions for Use 263
Safety Guideline for Turbomolecular Pumps 264
General Information 265
Storage 268
Preparation for installation 269
Installation 271
Pump Fixing 274
Use of TwisTorr 74 FS 275
Maintenance 277
Disposal 278
17
Technical Information 279
Description of the TwisTorr 74 FS281
Technical Specification 285
TwisTorr 74 FS Outline 288
Interconnections 305
Soft Start 307
Inlet screen installation 308
Air Cooling Kit Installation 312
Water Cooling Kit Connection 314
Vent Accessories 317
Vibration Isolator Installation 319
Purge Valve Installation 320

Table of Contents

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