Technical data
Version: 1.0 ───
33XPlanar
Properties
Aluminum components tile anodized
Aluminum components mover blasted
Stator area painted
System size XPlanar
Tiles per EtherCAT G master 10
Max. number of EtherCAT G masters 10
System properties
Mover APM
4220 4330 4550
Maximum flight height
without load[mm] * 5 *
Average feed force in direction of move-
ment in the XY-plane[N]
* 15 *
Repeatability
XY-axis[µm] * ±50 *
Z-axis[µm] * ±60 *
A-axis[mrad/°] * ±1.5/±0.086 *
B-axis[mrad/°] * ±1.5/±0.086 *
C-axis[mrad/°] * ±1.5/±0.086 *
Synchronization accuracy
XY-axis[µm] * ±250 *
Z-axis[µm] * ±200 *
A-axis[mrad/°] * ±5/±0.29 *
B-axis[mrad/°] * ±5/±0.29 *
C-axis[mrad/°] * ±5/±0.29 *
Absolute accuracy
XY-axis[µm] * ±150 *
Z-axis[µm] * ±150 *
A-axis[mrad/°] ±5/±0.29 *
B-axis[mrad/°] * ±5/±0.29 *
C-axis[mrad/°] * ±5/±0.29 *
Number of movers per CPU core * 1-2 *
*For further information contact your local Beckhoff office or support@beckhoff.com.
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