To Next PageTo Next PageWhat to do if Brooks SLA5863 output signal stays at approx. 5.5 Vdc or 22 mA?
If the output signal of your Brooks Measuring Instruments stays around 5.5 Vdc or 22 mA, even when the Setpoint changes, and there's flow, it could be due to a valve issue. Specifically, the valve may be leaking or stuck open. Another potential cause is +15 V applied to the valve override input. You may also check the valve override terminal (Pin 12).
How to fix controller oscillations in Brooks SLA5863?
If the controller oscillates in your Brooks Measuring Instruments, it could be due to pressure drop or inlet pressure deviating from calibrated values. Adjust the pressures to the original specifications.
Why won't the output signal go below 2% on Brooks Measuring Instruments?
If the output signal of your Brooks Measuring Instruments follows the setpoint at higher setpoints but will not go below 2%, it might be because the control valve leaks or is stuck open. You should clean the control valve.
General| Model | SLA5863 |
|---|---|
| Manufacturer | Brooks |
| Type | Mass Flow Controller |
| Flow Range | Depends on model and configuration |
| Pressure Rating | Depends on model and configuration |
| Operating Temperature | 0 to 50°C |
| Output Signal | 0-5 VDC, 4-20 mA |
| Power Supply | 15-24 VDC |
| Materials | Stainless steel |
| Approvals | CE |
| Response Time | < 1 second |
| Communication Protocol | Analog |
| Flow Rate Range | Depends on model and configuration |
| Gas Compatibility | Various gases (specific gases depend on configuration) |
References tables for detailed technical specifications of the SLA5800 Series, including performance ratings.
Provides detailed CAUTIONS and recommended procedures for installing the MFC/MFM in a clean, dry environment.
Discusses managing pressure during startup for high-pressure applications to prevent damage.
Highlights specific installation advice for the SLA5853 model due to its dual-stage valve design.
Provides step-by-step instructions for verifying the proper operation of the MFC/MFM using analog I/O signals.
Outlines the procedure for checking the operation of MFC/MFM via digital I/O and network controllers.
Outlines alarm features for analog versions, including diagnostic and general alarms, and their configuration.
Offers guidance on diagnosing common MFC/MFM problems related to flow rate and signal issues.
Covers crucial safety warnings and precautions for installing and operating Brooks Instrument products.
Explains the applicability of the PED directive to pressure equipment and compliance requirements.
Details EMC directive compliance and requirements for signal cable quality and connectors.
Provides essential handling procedures for components sensitive to electrostatic discharge to prevent damage.
