Brooks SLA5863 - Linear Ramp-Up And;Or Ramp-Down from 200% Per Second down to 0.5% Per Second Setpoint Change; Response Performance of Brooks Digital MFC

1-7
Section 1 Introduction
Brooks
®
Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Figure 1-3 Linear Ramp-up and/or Ramp-down from 200% Per Second Down to 0.5 % Per Second Setpoint Change
Figure 1-2 Response Performance of Brooks Digital MFC
Linear ramp-up or ramp-up/down (Figure 1-3) set by user via software
tools or digital commands.
Linear ramp-up/ramp-down is adjustable at 200% per second down to
0.5% per second setpoint change.