Brooks SLA5863 - Dimensions - Model SLA5853, Thru-Flow, Ethercat; Dimensions - Model SLA5853, Thru-Flow, Profibus

1-16
Brooks
®
Digital MFC's & MFM's
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Figure 1-16 Dimensions - Model SLA5853, Thru-Flow, Profibus
Figure 1-17 Dimensions - Model SLA5853, Thru-Flow, EtherCAT
Note: Aux Input is used for Remote
Transducer Pressure Controllers only.
Note: Aux Input is used for Remote Transducer Pressure Controllers only.