Brooks SLA5863 - Dimensions - Model SLA5851, Thru-Flow, Devicenet; Dimensions - Model SLA5851, Thru-Flow, Ethercat

1-13
Section 1 Introduction
Brooks
®
Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Figure 1-10 Dimensions - Model SLA5851, Thru-Flow, EtherCAT
Figure 1-11 Dimensions - Model SLA5851, Thru-Flow, DeviceNet
Note: Aux Input is used for Remote
Transducer Pressure Controllers only.
Note: Aux Input is used for Remote Transducer Pressure Controllers only.