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EBARA EV-S20 - User Manual

EBARA EV-S20
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

  • D
    Deanna Miller DVMSep 12, 2025
    What does 'ALARM:STARTFAIL ALARM/WARN EXIST' mean on my EBARA EV-S20 Water Pump?
    • S
      sharpmindySep 12, 2025
      If your EBARA Water Pump displays 'ALARM:STARTFAIL ALARM/WARN EXIST', it could be due to starting during WARNING/ALARM status or instrument failure. Make sure that all starting conditions are met or replace the instrument.
  • K
    Katrina EllisSep 9, 2025
    What does 'ALARM: PHASE ERROR' mean on my EBARA Water Pump?
    • S
      Sean PittsSep 10, 2025
      If you're seeing 'ALARM: PHASE ERROR' on your EBARA Water Pump, it could be due to an open phase or incorrect wiring. Replace the instrument or check the power supply.
  • C
    christophershortSep 8, 2025
    What does 'ALARM: BP DRIVER ### ALARM: MP DRIVER ###' mean on my EBARA EV-S20?
    • M
      Mark WernerSep 8, 2025
      If your EBARA Water Pump displays 'ALARM: BP DRIVER ### ALARM: MP DRIVER ###', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, the cooling water flow rate may be reduced or the motor driver has broken down. Check the exhaust pipe, reduce the inflow gas amount, replace or overhaul the pump, cool the pump thoroughly and reset, or replace the motor driver.
  • R
    Rebekah DrakeSep 7, 2025
    What does 'ALARM:BP MOTOR STEP OUT ALARM:MP MOTOR STEP OUT' mean on my EBARA EV-S20 Water Pump?
    • D
      donna17Sep 7, 2025
      If your EBARA Water Pump displays 'ALARM:BP MOTOR STEP OUT ALARM:MP MOTOR STEP OUT', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, or there may be an instrument failure. Check the exhaust pipe, reduce the inflow gas amount, replace or overhaul the pump, or replace the instrument.
  • C
    christopher74Aug 23, 2025
    What to do if my EBARA EV-S20 shows 'ALARM: EMERGENCY STOP'?
    • W
      Whitney ParkerAug 23, 2025
      If the EBARA Water Pump displays 'ALARM: EMERGENCY STOP', it's likely due to the emergency stop switch being activated. Ensure the pump can be operated and turn the button head to release the lock.
  • G
    gsilvaSep 5, 2025
    What does 'ALARM:BP MOTOR OVERLOAD 2 ALARM:MP MOTOR OVERLOAD 2' mean on my EBARA EV-S20?
    • H
      hannahadamsSep 5, 2025
      If your EBARA Water Pump displays 'ALARM:BP MOTOR OVERLOAD 2 ALARM:MP MOTOR OVERLOAD 2', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, or there may be an instrument failure. Check the exhaust pipe & silencer, reduce the inflow gas amount, replace or overhaul the pump, or replace the instrument.
  • T
    Tracy SimonSep 4, 2025
    What to do if my EBARA EV-S20 MP does not start when entering external “MP start” signal input?
    • J
      Jodi MartinezSep 4, 2025
      If the MP on your EBARA Water Pump doesn't start when entering external “MP start” signal input, it might be because “Local” or “COM” mode has been selected, start-up conditions are not satisfied, or there is an instrument failure. Set the switch to “Remote” or satisfy all start-up conditions. If the problem persists, replace the instruments.
  • N
    Natalie AlexanderSep 3, 2025
    What does 'WARN: PUMP N2 FLOW LOW' mean on my EBARA EV-S20?
    • J
      Jeffery LopezSep 3, 2025
      If your EBARA Water Pump displays 'WARN: PUMP N2 FLOW LOW', it could be due to several reasons: the N2 port is not connected, the primary pressure is insufficient, the regulator setting value is too low, the N2 pipe is clogged or there are leaks on N2 pipe, or there is an instrument failure. Connect the N2 pipe fitting, apply sufficient pressure, increase the pressure setting, replace the N2 piping, check the fittings, or replace the instrument.
  • A
    Andrea ClarkSep 2, 2025
    What does 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH' mean on my EBARA EV-S20?
    • M
      Michael BerrySep 2, 2025
      If the EBARA Water Pump displays 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH', the cooling water flow may be reduced, or there may be a motor failure. Cool the pump thoroughly and reset it, or replace or overhaul the pump.
  • S
    Stephen CabreraAug 31, 2025
    What to do if my EBARA EV-S20 MP does not start when applying START button?
    • J
      jamesjohnsonSep 1, 2025
      If the MP (Main Pump) on your EBARA Water Pump doesn't start when you press the START button, it might be because “Remote” or “COM” mode has been selected or start-up conditions are not satisfied. Alternatively, there could be an instrument failure. Set the switch to “Local” mode or satisfy all start-up conditions. If the problem persists, replace the instruments.

Summary

Safety Information

Hazard Level Definitions

Definitions of DANGER, WARNING, and CAUTION levels used in the manual.

Important Prior Warnings

Electrical and Material Safety

Safety guidelines for electrical work and handling hazardous materials.

Safety Interlocks

Product Description

Residual Energy and Power Shutoff

Electrical Power Lockout;Tagout

Procedures for safely disconnecting electrical power before maintenance.

Detailed Specifications

Performance Curves

Installation Guidelines

Location, Mounting, and Leveling

Site selection, mounting, and leveling procedures for pump installation.

Piping Connections

Electrical Wiring Safety

Setting Operational Modes

DIP Switch Configuration

Disconnection and Transportation

Troubleshooting Overview

General Warnings and Basic Issues

Precautionary advice before troubleshooting and common basic problems.

Troubleshooting Warnings

Troubleshooting Alarms

EBARA EV-S20 Specifications

General IconGeneral
ModelEV-S20
CategoryWater Pump
ApplicationIndustrial
Power0.75 kW
Voltage220-240 V
Frequency50 Hz / 60 Hz (depending on the model)
MaterialStainless Steel

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