Edwards EXT Series - Page 16

B753-03-880 Issue F
Page 10 © Edwards Limited 2008. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
Inlet pumping speed
N
2
† ‡
220 l s
-1
220 l s
-1
195 l s
-1
Pb < 5 mbar (500 Pa)
Qi < 70 sccm
(1.17 mbar l s
-1
)
(117 Pa l s
-1
)
He
† ‡
230 l s
-1
230 l s
-1
155 l s
-1
Pb < 1 mbar (100 Pa)
Qi = 0 sccm
H
2
† ‡
180 l s
-1
180 l s
-1
100 l s
-1
Pb < 0.5 mbar (50 Pa)
Qi = 0 sccm
Inlet compression ratio
N
2
† ‡
> 1 x 10
8
>1 x 10
8
3 x 10
8
Pb < 5 mbar (500 Pa)
He
† ‡
4 x 10
5
2.5 x 10
5
2 x 10
5
Pb < 2 mbar (200 Pa)
H
2
† ‡
1.6 x 10
4
1.1 x 10
4
5 x 10
3
Pb < 1 x 10
-2
mbar (1 Pa)
Interstage pumping speed
‡
N
2
†
-10 l s
-1
21 l s
-1
Pb = 5 mbar (500 Pa)
Qi = 240 sccm (4 mbar l s
-1
)
(400 Pa l s
-1
)
Qp = 0 sccm
He
†
-10 l s
-1
23 l s
-1
Pb = 5 mbar (500 Pa)
Qi = 100 sccm
(1.67 mbar l s
-1
)(167 Pa l s
-1
)
Qp=<20 sccm
(0.33 mbar l s
-1
)(33 Pa l s
-1
)
Ultimate pressure with rotary
vane backing pump
**
DN100ISOK inlet flange < 5 x 10
-9
< 5 x 10
-9
< 5 x 10
-9
DN100CF inlet flange < 5 x 10
-10
--
Ultimate pressure with
diaphragm backing pump
††
DN100ISOK inlet flange < 5 x 10
-8
< 5 x 10
-8
< 5 x 10
-8
DN100CF inlet flange < 5 x 10
-8
--
Maximum backing pressure
‡‡
N
2
12 mbar
(1200 Pa)
12 mbar
(1200 Pa)
12 mbar
(1200 Pa)
He 10 mbar
(1000 Pa)
10 mbar
(1000 Pa)
10 mbar
(1000 Pa)
H
2
3 mbar
(300 Pa)
3 mbar
(300 Pa)
3 mbar
(300 Pa)
Minimum backing pump
displacement
0.6 m
3
h
-1
0.6 m
3
h
-1
0.6 m
3
h
-1
Maximum continuous inlet
pressure
***
water-cooling at 15 °C
***
2 x 10
-1
mbar,
20 Pa
2 x 10
-1
mbar,
20 Pa
2 x 10
-1
mbar,
20 Pa
air-cooling at 35 °C
***
2 x 10
-2
mbar,
2 Pa
2 x 10
-2
mbar,
2 Pa
2 x 10
-2
mbar,
2 Pa
Table 1 - Technical data (continued)
Parameter EXT255H EXT255Hi EXT255HVi Notes