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Edwards iTIM E73/A1/T1 - Gate Valve Status Query Message (?G); Information Query Message (?I); Load-Lock Pump Status Query Message (?L); Nitrogen Supply Status Query Message (?N)

Edwards iTIM E73/A1/T1
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© Edwards Limited 2007. All rights reserved. Page 23
Edwards and the Edwards logo are trademarks of Edwards Limited.
Serial Interface Operation
D374-20-880 Issue E
5.3.7 Gate valve status query message (?G)
Send this query message to determine the status of the gate valve (if fitted). The {on/off} part of the reply message
is set as follows:
z {on/off} = 0 means that the gate valve is closed.
z {on/off} = 1 means that the gate valve is open.
If you have selected long replies, the long reply message will also include the {alarm type}, set as follows:
z {alarm type} = 0 means that there is no alarm.
z {alarm type} = 9 means that the gate valve failed to open after a command message to open the valve.
z {alarm type} = 11 means that the gate valve failed to close after a command message to close the valve.
5.3.8 Information query message (?I)
Send this query message to determine which parameters (if any) have a priority level greater than 0. The {number}
part of the reply message specifies the number of parameters that have a priority level greater than 0.
If you have selected long replies and the {number} part of the reply message is not 0, the long reply will also contain
information about parameters that have a priority level = 1, followed by information about all of the parameters that
have a priority level >1.
The information for each parameter is in the form “{parameter}, {priority level}, {alarm type}, {bitfield status}”. The
information for each parameter is seperated from the information for the previous parameter (or from the {number}
part of the reply) by a “;” (semicolon) character.
5.3.9 Load-lock pump status query message (?L)
Send this query message to determine the status of the load-lock pump. The {on/off} part of the reply message is set
as follows:
z {on/off} = 0 means that the load-lock pump is off.
z {on/off} = 1 means that the load-lock pump is on.
5.3.10 Nitrogen supply status query message (?N)
Send this query message to determine the status of the nitrogen supply. The {on/off} part of the reply message is set
as follows:
z {on/off} = 0 means that the nitrogen supply is off.
z {on/off} = 1 means that the nitrogen supply is on.
5.3.11 On process status query message (?O)
Send this query message to determine whether the On process flag is set or not. The {on/off} part of the reply
message is set as follows:
z {on/off} = 0 means that the On process flag is not set.
z {on/off} = 1 means that the On process flag is set.

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