Edwards iTIM E73/A1/T1 - Page 4

D374-20-880 Issue E
Page ii © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
5.3.15 Pump node type query message (?T) ................................................................................24
5.3.16 Inlet purge status query message (?U) ...............................................................................24
5.3.17 Value query message (?V) .............................................................................................24
5.4 Command Messages .....................................................................................................24
5.4.1 Message syntax ..........................................................................................................24
5.4.2 Control command message (!C) ......................................................................................25
5.4.3 Gas ballast command message (!D) ..................................................................................25
5.4.4 Format mode command message (!D) ...............................................................................25
5.4.5 Gate valve command message (!G) ..................................................................................25
5.4.6 Load-lock pump command message (!L) ............................................................................25
5.4.7 Simulation mode command message (!M) ...........................................................................26
5.4.8 Nitrogen supply command message (!N) ............................................................................26
5.4.9 On process command message (!O) ..................................................................................26
5.4.10 Pump command message (!P) .........................................................................................26
5.4.11 Run til crash command message (!R) ................................................................................26
5.4.12 Inlet purge command message (!U) ..................................................................................26
5.5 Simulation Mode ........................................................................................................27
5.5.1 Introduction .............................................................................................................27
5.5.2 Simulated pumping system ............................................................................................27
6 Maintenance ..................................................................................... 29
6.1 Inspect the Electrical Connections ...................................................................................29
6.2 Fault Finding .............................................................................................................29
6.2.1 Tool Interface Problems ...............................................................................................29
6.2.2 Error number reply messages .........................................................................................29
6.2.3 Determine the pumping system error number .....................................................................29
6.2.4 Serial Communications Problems .....................................................................................30
7 Storage and Disposal ........................................................................... 31
7.1 Storage ...................................................................................................................31
7.2 Disposal ...................................................................................................................31
8 Service, Spares and Accessories .............................................................. 33
8.1 Service ....................................................................................................................33
8.2 Spares .....................................................................................................................33
8.3 Accessories ...............................................................................................................33
Index .............................................................................................. 35
Illustrations
Figure Page
1 Components of the iTIM ................................................................................................ 3
2 Components of the iTIM (without E73 connector) .................................................................. 4
3 Dimensions (mm) ........................................................................................................ 7
4 Fitting the iTIM to a Dry Pumping System ...........................................................................10