B800-00-880 Issue D
Page 30 © Edwards Limited 2013. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Installation
3.3 Connection to the vacuum system
Edwards recommends leak testing the system after installation has been completed.
Figure 10 - Typical pumping system with a nEXT pump
Ensure that all wires and piping are routed appropriately to avoid the risk of tripping.
Install the pump in the vacuum system before the logic interface cable is connected to the control
equipment and before the electrical supply is connected. This will ensure that the pump cannot
operate accidentally causing injury.
1. Vacuum system
2. High-vacuum gauge
3. Vibration damper
4. Inlet screen
5. nEXT pump
6. Backing valve
7. Vacuum gauge
8. Flexible bellows
9. Foreline trap
10. Rotary backing pump
11. Mist filter
12. Vent valve
13. Alternative position for
vent valve
14. Air cooler
15. PRX purge restrictor
16. Regulated purge gas supply
17. WCX water cooler and connections
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