temperature or di
erent ambient pressures pump performance may be compromised
and the rotaonal speed may drop below nominal.
Note:
F
or the nXR120i, the pump may thermally protect itself and shut down, if:
1) the connuous operang pressure at the inlet is greater than 20 mbar
2) the nXR120i is used to evacuate large chambers, parcularly if large connuous gas
loads are combined with the chamber pump-down, Table: nXR120i applicaon guidelines
for chamber pump-down provides guidelines on the acceptable applicaon parameters.
It is also advised to start chamber evacuaon with the pump at rest than with the pump
already operang at full rotaonal speed.
Figure 5 nXR120i applicaon guidelines for chamber pump-down
0
2
4
6
8
10
12
14
16
18
20
0 50 100 150 200 250 300 350
Gas flow (slm)
Chamber volume (litres)
GE/3806/A
Table 8
Sound data
Declared dual-number noise emission values in accordance with ISO 4871
nXR30i nXR40i nXR60i nXR90i nXR120i
Measured A-weighted emission sound pres-
sure level, L
pA
at ulmate vacuum 1 m from
the pump in free space
55.0 dB(A)
Measured A-weighted emission sound pres-
sur
e level, L
pA
at 15 mbar at inlet 1 m from the
pump in free space
57.0 dB(A)
Uncertainty, K
pA
2.5 dB(A)
Product tested to ISO standard 3744:2010
05/2021 - ©Edwards Limited
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A90301880_C - Technical data
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