Midas
®
Gas Detector
B-7
Gas Name Formula Range
Lower
Alarm
Limit
Default
Alarm 1
Default
Alarm 2
Sensor Part
Number
Maximum
Sensor
Warm-up Time
(minutes)
Sensor
Cartridge
ID
Gas
ID
Flow
Rate
(cc/
min)
Calibration Bump Test
Recommended
Maximum
Sample Line
Length (m)
End of Lne
Filter
Calibration
Gas
Conc
(ppm)
Output
Equiv.
(ppm)
Exp
Time
(sec)
Recommended
Bump Test
Gas
Conc
(ppm)
Max
Time
(sec)
Silane Low Level SiH
4
0-2 ppm 0.24 ppm 0.25 ppm 0.50 ppm MIDAS-S/E-SHL 20 06 1 500 SiH
4
1 1 300 H
2
S 3 180 30
780248,
1991-0147
or
1830-0055
Sulfur Dioxide SO
2
0-8 ppm 0.95 ppm 1 ppm 2 ppm MIDAS-S/E-SO2 10 23 1 500 SO
2
4 4 300 SO
2
4 180 30
1991-0147
or
1830-0055
TEOS TEOS 0-40 ppm 4.8 ppm 5 ppm 10 ppm MIDAS-S/E-TEO 10 24 1 500 ETO 20 20 300 ETO 25 180 30
780248,
1991-0147
or
1830-0055
Tungsten
Hexafluoride
WF
6
0-12 ppm 1.45 ppm 1.5 ppm 3 ppm MIDAS-S/E-HFX 20 08 4 500 HF 5 5 300 Cl
2
10 180 5
4
1991-0147
or
1830-0055
Tungsten
Hexafluoride
Low Range
WF
6
0-2 ppm 0.24 ppm 0.25 ppm 0.5 ppm MIDAS-E-HFU 20 32 3 500 HF 1 1 300 Cl
2
1 180 5
1991-0147
or
1830-0055
Tungsten
Hexafluoride Low
Level
WF
6
0-2 ppm 0.24 ppm 0.25 ppm 0.5 ppm MIDAS-S/E-HFL 20 26 3 500 HF 1 1 300 Cl
2
1 180 5
4
1991-0147
or
1830-0055
780248,
1991-0147
or 1830-0055
Silane SiH
4
0-20 ppm 2.4 ppm 2.5 ppm 5 ppm MIDAS-S/E-SHX 20 05 1 500 SiH
4
10 10 300 H
2
S 50 180 30