Inficon CDG025D2 - Page 65

tirb45e1 (2019-02) CDGxxxDxx.cp 65
 [7] www.inficon.com
Operating Manual
Stripe CDG100Dhs
tina95d1 (German)
tina95e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein
 [8] www.inficon.com
Operating Manual
Stripe CDG160Dhs, CDG200Dhs
tinb45d1 (German)
tinb45e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein
 [9] ETG.1000.2: Physical Layer service definition and protocol specification
 [10] ETG.1000.3: Data Link Layer service definition
 [11] ETG.1000.4: Data Link Layer protocol specification
 [12] ETG.1000.5: Application Layer service definition
 [13] ETG.1000.6: Application Layer protocol specification
 [14] ETG.1020: EtherCAT Protocol Enhancements
 [15] ETG.2000: EtherCAT Slave Information
 [16] ETG.5001.1: Modular Device Profile – Part 1: General MDP Device
Model
 [17] ETG.5003.1 S (R) V1.1.0: Semiconductor Device profile – Part 1:
Common Device Profile (CDP)
 [18] ETG.5003.2080 S (R) V1.3.0: Semiconductor Device profile – Part
2080: Specific Device Profile (SDP): Vacuum Pressure Gauge
 [19] IEC 61158-x-12 (all parts for type 12): Industrial communication
networks – Fieldbus specifications
 [20] IEC 61784-2: Industrial communication networks – Profiles – Part 2:
Additional fieldbus profiles for real-time networks based on ISO/IEC
8802-3
 [21] SEMI E54 / Draft 5102A: SPECIFICATION FOR SENSOR/ACTUATOR
NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PRESSURE
GAUGES
 [22] SEMI E52: Practice for referencing gases, gas mixtures and vaporizable
materials used in digital mass flow controllers