LEYBOLD MAG W 2010 C - Page 33

Operation
33
GA 05.139/1.02 - 06/99
10
3
Forevacuum pressure/mbar
10
2
10
1
10
0
10
-1
10
-2
10
-3
Fig. 30 Curve for safe venting of the MAG;
pressure rise as a function of venting time
0 10 20 30 40 50 60
Time/s