62
GA 05.139/1.02 - 06/99
The system MAG 2000
• turbomolecular pump
• connecting cables
• frequency converter
has been tested by the TÜV Rheinland of North America
according to the requirements of
• NRTL
(used standards UL 3101, EN 61010) and
• SEMI S2
The components are in compliance to the tested stan-
dards.
NRTL Report No. E9814034E01
The tested system includes the following components:
Turbomolecular pump MAG (W) 1600/2000,
Cat. Nos. 121 31, 121 32
894 14, 894 15, 894 16, 894 17,
894 28, 894 29, 894 30, 894 31
Frequency converter MAG.DRIVE 2000,
Cat. Nos. 121 35, 121 37, 121 44
Plug-in control, Cat. No. 121 36
BEARING cable, Cat. Nos.
121 17, 121 19, 121 21, 121 25, 121 29
DRIVE/TMS cable, Cat. Nos.
121 18, 121 20, 121 22, 121 26, 121 30
Certifications
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