19
e. Polarizing performance is.
insufficient.
Polarizer is not inserted in light path. Engage polarizer in light path.
Problem Cause Remedy Page
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10-14
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24-27
Analyzer is not inserted in light path.
Engage analyzer in light path.
Optical element is engaged.
Engage empty position by rotating turret.
Aperture iris diaphragm is opened. Either stop down aperture iris diaphragm or
swing out top lens.
f. No interference color appears dur-
ing Nomarski observation.
Polarizer is not inserted in light path. Engage polarizer in light path.
Analyzer is not inserted in light path. Engage analyzer in light path.
DIC prism is not inserted in light path. Engage DIC prism by rotating turret.
DIC slider is not inserted in light path. Engage DIC slider in light path.
Polarizer and analyzer are not in “crossed Nicol”
position.
Re-adjust polarizer.
g. Interference color appears during
Nomarski observation but color
is uneven.
Vertical positioning of condenser is incorrect. Center condenser.
Incorrect optical element is inserted in light
path.
Engage optical element that matches objec-
tive in use by rotating turret.
Incorrect objective is in use. See table “Optical Elements and Compatible
Objectives” and use correct objective.
1-
plate U-UCDTP530) is inserted in light path. Disengage 1- plate from light path.
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ax7353_inst.pmd 20.04.2005, 12:2719
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