PTI SENTRY 1510 - User Manual

Operation & Installation Manual
SENTRY™ 1510
Section 1: Introduction, General Description & Requirements
1.1 Introduction
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Theory of Operation
The SENTRY 1510 is a pressure regulation controller designed to be used in a
clean room for vertical furnaces. The SENTRY 1510 is installed between the
output of the furnace and the facilities exhaust line. The 1510 can control the
pressure inside the tube to a set point programmed through the furnace controller
or the SENTRY Supervisor.
The SENTRY 1510 isolates the pressure inside the process tube from house ex-
haust pressure variations. The 1510 provides a stable, repeatable process pres-
sure, allowing process optimization and improving process repeatability:
1. The SENTRY 1510 provides a constant pressure (either positive or negative
with respect to the room) for the process. (This allows the process engineer to
optimize the process with respect to pressure. Once optimized, the process
pressure can be fixed, which will then improve the repeatability of film
qualities.)
2. The SENTRY 1510 prevents backstreaming of house exhaust contaminants
into the tube (these contaminants can reduce oxide or diffusion integrity).
3. In the negative pressure configuration, the SENTRY 1510 can reduce the
possibility of HCl fumes escaping into the fab.

Summary

Introduction, General Description, and Requirements

System Introduction

Overview of the Sentry 1510 system and its purpose in clean rooms.

Theory of Operation Explained

Explains how the SENTRY 1510 regulates pressure using a floating piston mechanism.

General Description of SENTRY 1510

Details the SENTRY 1510's components, including the floating piston concept.

The Floating Piston Mechanism

Details the mechanical concept of the floating piston and forces acting upon it.

Nitrogen Supply Functions

Describes the functions of nitrogen supply for purging, curtains, and piston bearing.

SENTRY 1510 Requirements

Outlines necessary requirements for the SENTRY 1510 installation and operation.

House Exhaust Requirements Calculation

Calculations for minimum house exhaust needed for specific installation setups.

Electrical Components Overview

Details the electrical parts of the SENTRY 1510 system, including the Supervisor and transducer.

Functional Description and Operation

Key System Components

Describes the main components of the SENTRY 1510 system.

SENTRY 1510 Operation Modes

Explains how to operate the SENTRY 1510 in manual, analog, and serial modes.

SENTRY 1510 Installation Guide

Installation Procedure Overview

Provides step-by-step instructions for installing the SENTRY 1510 system.

General Installation Guidelines

Covers essential guidelines for mounting, cable routing, and sense tube length.

Connecting Furnace Exhaust and Sense Tube

Details connecting the furnace exhaust and installing the pressure sense tube.

Supervisor and Nitrogen Connections

Explains electrical connections to the supervisor and nitrogen supply hookup.

Supervisor Parameter Configuration

Guides on adjusting supervisor parameters for optimal operation.

Installation Testing Procedures

Procedures for testing the system in local and remote analog modes post-installation.

Operating the SENTRY 1510

System Operation Overview

Overview of system operation and interface usage.

Manual Mode Operation

How to use the system with the supervisor keypad for set points and parameters.

Supervisor Operation Modes

Describes available operation modes like Pressure Mode and Flow Mode.

Saving Menu Configuration

Instructions on saving configured menu settings into non-volatile memory.

SENTRY 1510 Maintenance

Maintenance Overview

Introduction to maintenance procedures and schedules.

Preventive Maintenance Schedule

Recommends a monthly schedule for routine checks to prevent issues.

Pressure Transducer Recalibration

Procedure for recalibrating the pressure transducer for accurate readings.

Optimizing Gain Setting

Steps to fine-tune the gain setting for optimal pressure control.

SENTRY 1510 Troubleshooting

Troubleshooting Guide

Guide for identifying and resolving common problems with the SENTRY 1510.

Diagnosing Unstable Exhaust Pressure

Flowchart to diagnose and fix unstable exhaust pressure issues.

Troubleshooting Pressure Exceeding Set Point

Flowchart to troubleshoot when measured pressure exceeds the set point.

Troubleshooting Pressure Below Set Point

Flowchart to diagnose and resolve situations where measured pressure is below set point.

Troubleshooting Non-Responsive Electronics

Troubleshooting steps for when the unit fails to respond to electronic commands.

Facility Requirements and Parameters

Standard Cable Assemblies

Lists standard cable assemblies for connecting the SENTRY system.

Facilities Requirements Overview

Details performance, physical, and operating environment specifications for the system.

Menu Parameter Settings

Lists preset factory parameters for the Supervisor, which may vary by application.

PTI SENTRY 1510 Specifications

General

Brand	PTI
Model	SENTRY 1510
Category	Controller
Language	English