Renishaw ATOM

61
www.renishaw.com
40µm system
20µm system
Speed
Maximum speed (m/s)
Lowest recommended
counter input frequency
(MHz)
0020
(1 µm)
0040
(0.5 µm)
0080
(0.25 µm)
0100
(0.2 µm)
0200
(0.1 µm)
0400
(50 nm)
1000
(20 nm)
2000
(10 nm)
6.5 6.5 6.5 5.8 3 - - - 40
6.5 6.5 4 3.2 1.6 - - - 20
- - - - - 0.35 0.13 0.065 12
6.5 4 2 1.6 0.8 - - - 10
- - - - - 0.18 0.06 0.03 6
4 2 1 0.8 0.4 - - - 5
- - - - - 0.12 0.04 0.02 4
Maximum speed (m/s)
Lowest recommended
counter input frequency
(MHz)
0020
(2 µm)
0040
(1 µm)
0080
(0.5 µm)
0100
(0.4 µm)
0200
(0.2 µm)
0400
(0.1 µm)
1000
(40 nm)
2000
(20 nm)
13 13 13 11.6 6 - - - 40
13 13 8 6.4 3.2 - - - 20
- - - - - 0.7 0.26 0.13 12
13 8 4 3.2 1.6 - - - 10
- - - - - 0.36 0.12 0.06 6
8 4 2 1.6 0.8 - - - 5
- - - - - 0.24 0.08 0.04 4