Sumitomo Marathon CP-8 - Page 12

Introduction
6
Figure 1 Typical Cryopump Systems
S R
1 Nitrogen Purge
2 To Rough Pump
3 Vent Relief Valve to a Safe Location
4 To Temperature Monitor
Gas Lines
Cold Head Cable
Marathon CP-8 Cryopump
Helium Compressor
Gas Lines
Cold Head Cables
Helium Compressor
2 or 3 Marathon CP-8 Cryopumps
2
1
3
4
Multiple Cryopump Application
SR
Single Cryopump Application