Sumitomo Marathon CP-8 - Table of Contents

TABLE OF CONTENTS
i
Page
SAFETY.......................................................................................................................... 1
SERVICE ............................................................................................................................ 3
INTRODUCTION ............................................................................................................ 5
Cryopumps .......................................................................................................... 5
PRINCIPLES OF OPERATION ...................................................................................... 7
DESCRIPTION ............................................................................................................... 9
Cryopump Components ..................................................................................... 10
SPECIFICATIONS ........................................................................................................ 11
Cold Head ........................................................................................................ 11
Pumping Speeds ............................................................................................... 11
Throughput ........................................................................................................ 11
Capacity ............................................................................................................ 11
Crossover Rating ............................................................................................... 11
Cooldown Time ................................................................................................. 11
Weight. .............................................................................................................. 11
Mounting Flange ................................................................................................ 11
Connections ...................................................................................................... 11
Gas Line Couplings ........................................................................................... 11
Cold Head Cable Receptacle ............................................................................ 11
Standard Single Silicon Diode Temperature Sensor and Optional Dual
Temperature Sensor (for MCC) ......................................................................... 11
Standard Single Temperature Sensor Connector .............................................. 12
Optional Dual Temperature Sensor Connector (for MCC) .................................. 12
Alternate Single Silicon Diode Temperature Sensor .......................................... 12
Compressor ....................................................................................................... 12
Refrigerant Quality............................................................................................. 12
Adapter Fittings (Optional Accessories) ............................................................. 13
Environmental Requirements ............................................................................ 13
Maintenance Interval ......................................................................................... 13
Supplier Name and Address .............................................................................. 13
Regulatory Compliance ..................................................................................... 14
INSTALLATION ............................................................................................................ 15
Introduction ...................................................................................................... 15
Unpacking, Inspection and Pressure Check ..................................................... 15
Cryopump Lifting Instructions ........................................................................... 17
Compressor Position ........................................................................................ 18
Compressor Checkout ..................................................................................... 18
Remove the Existing Pumping System ............................................................ 19
Temperature Sensor Cable Assembly (Optional Accessory) ............................ 20
Install the Cryopump ........................................................................................ 20
Install the Gas Manifolds (if used) .................................................................... 21
Install the Gas Lines ........................................................................................ 22
Install the Cold Head Cable.............................................................................. 24
Connect the Purge Gas, Vacuum and Vent Lines ............................................ 24
Remote On/Off Cable (Optional Accessory) ..................................................... 26