Sumitomo Marathon CP-8 - Shutdown: One Cryopump in a Multiple Cryopump System

Operation
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Shutdown: One Cryopump in a Multiple Cryopump System
Some compressors are capable of operating up to three cryopumps simultaneously. If only one
cryopump is to be shut down:
1. Close the gate valve to isolate the cryopump from the main vacuum chamber.
2. Disconnect the appropriate cold head cable from the compressor. The cryopump will stop.
3. Expect gas release through the disconnected cryopump's pressure relief valve as described
in the section Regeneration: Warm-Up Phase.
4. Begin nitrogen gas purge of the disconnected cryopump as described in Regeneration:
Purge Phase, to dilute hazardous gases.