Maintenance
2. Using two wrenches, disconnect the gas lines from the cryopump. Install dust caps and
plugs on the cold head and gas line couplings. See the next section.
3. Disconnect the cold head cable, vacuum roughing line, nitrogen purge line and temperature
sensor cable from the cryopump.
4. Support the weight of the cryopump and remove the mounting hardware.
5. Pull the cryopump clear of the vacuum chamber. Protect the surfaces of the mating,
mounting flanges.
Disconnect the Gas Lines
Tools required: Open end wrenches 1”, 1 1/8” and 1 3/16”.
AVOID INJURY. Disconnect gas lines only when the compressor is stopped.
Disconnecting the cold head while it is cold can create excessively high internal
pressure as the gas warms. Material failure and uncontrolled pressure release
can cause serious injury.
AVOID INJURY. Use two wrenches when disconnecting a gas line coupling to
avoid loosening the cold head coupling. Gas pressure can project the coupling
with enough force to cause serious injury.
AVOID GAS LEAKS. Keep the gas line couplings aligned when making or
breaking a coupling connection. Leaks can occur due to the weight of the gas
line or due to a sharp bend near the connection. Crimping from repeated
bending a repositioning can cause damage to gas lines.
1. Always use two wrenches. Use one wrench to hold the cold head coupling. Use the second
wrench on the gas line coupling nut to break the connection. See Figure 16.
2. After breaking the connection, hold the coupling adapter with one wrench. Remove the gas
line coupling from the cold head coupling with the second wrench. See Figure 17. Remove
both gas lines from the cold head.
Figure 16 Break the Gas Line Connection Figure 17 Disconnect the Gas Line
from the Cold Head from the Cold Head
To Next Page
Loading...