Installation
The cryopump's mounting flange bolts to a gate valve that isolates the cryopump's chamber
from the main vacuum chamber. This type of mounting is the most common, because it is
versatile. A cryopump mounted to a valved chamber can be cooled down, kept cold or
regenerated independently of the main chamber. See Figure 8.
Figure 8 Cryopump Mounting
Cryopumps mounted with gate valves are often used in high-volume production applications
such as sputtering or ion implantation. The gate valve should close automatically if the cold
head or the compressor stops, or if there is a power failure. The gate valve should not open
automatically.
1. Be sure the mounting flange O-ring or metal gasket is in place.
2. Mount the cryopump to the isolation gate valve on the vacuum chamber.
Install the Gas Manifolds (if used)
Tools required: Open end wrenches, 1”, 1 1/8” and 1 3/16”
Gas manifolds are available from SCAI to be connected to the compressor's gas
couplings when the compressor powers multiple cryopumps.
1. Locate the gas manifolds and their installation drawing. Remove the dust plugs from the
female Aeroquip couplings.
2. Remove the dust caps from the supply and return helium gas couplings on the compressor.
Screw the dust plugs into the dust caps and store them.
3. Connect one manifold to the compressor's return gas coupling. Position the manifold
as shown on the installation drawing. Use two wrenches. Torque the coupling to
4.85 ± 0.7 kgf m (35 ± 5 ft. lbs.).
4. Connect the other manifold to the compressor's supply gas coupling. Install the support
bracket to the manifolds. Position and torque the supply manifold as stated above.
Cryopump
Isolation
Valve
Vacuum
Chamber
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