Maintenance
PRESERVE YOUR WARRANTY. Modification to equipment without the
consent of the manufacturer will void the warranty.
Specifications require the use of 99.995% pure helium gas. Using a lesser
quality of helium can damage the system and void the warranty.
AVOID SYSTEM CONTAMINATION. Follow the charging and venting
procedures to prevent reversed flow of system gas. Reversed flow can result in
contamination of the system with compressor oil.
Do not charge through the supply coupling. Do not vent through the return
coupling.
PREVENT SYSTEM MALFUNCTION. Repeatedly charging the system with
helium gas rather than locating and repairing gas leaks can cause a malfunction.
Impurities are introduced at an abnormal rate and may freeze in the cold head
AVOID REFRIGERANT LEAKS. Check the condition of the gasket seal on the
male half of each Aeroquip coupling. Be sure the gasket seal is in place and the
sealing surfaces on both the male and female halves are clean before
connecting. Replace the gasket seal if it is damaged or missing. Keep the gas
line couplings aligned when making or breaking a coupling connection. Leaks
can occur due to the weight of the gas line or due to a sharp bend near the
connection.
Compressor Adsorber Replacement
Replacement of the adsorber in the compressor capsule is scheduled, required maintenance.
Refer to the replacing procedure in the Maintenance section of the Compressor manual.
AVOID INJURY. The adsorber is charged with helium gas. Follow the used
adsorber venting procedure for safe disposal of the used adsorber.
Remove the Cryopump from the Vacuum Chamber
All of the following procedures apply only to cryopumps that have not been
contaminated by toxic or radioactive gases.
1. Follow the procedure in Regeneration: Warm-Up Phase, in the Operation section of this
manual.
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