Maintenance
3. Screw dust plugs finger tight into the Aeroquip couplings on the gas lines.
4. If the cold head is not to be vented, screw dust caps onto its two Aeroquip couplings.
Cryopanel Maintenance
Tools required: 7 mm combination wrench
5 mm hex key wrench
3 mm hex key wrench
Flat nose pliers
Medium slotted offset screwdriver
Metric socket head torque wrench (for reassembly)
The following procedure covers complete disassembly of the cryopump. The steps are in the
required sequence. If complete disassembly will not be required, stop at the appropriate step.
The cold head need not be removed from the cryopump to remove the cryopanels.
Although the cryopanels require no planned maintenance schedule, they should be removed
and cleaned if oils or other contaminants have gotten onto them and do not come off during
regeneration. If the charcoal inside the second-stage cryopanel remains contaminated, the
panel must be replaced.
The charcoal may degrade substantially if the minimum pressure is higher than normal
(1 x 10
-4
torr or 0.1 microns of mercury) during cryopumping. If the charcoal has degraded,
replace the second-stage cryopanel.
EXPLOSION HAZARD. AVOID INJURY. Cryopumped gases are retained only
while the cryopump is cold. Cryopumped gases may be toxic, flammable or may
produce high pressures when the cryopump is warmed to ambient temperature.
EXPLOSION HAZARD. AVOID INJURY. Do not remove, modify, block or
restrict any pressure relief devices. Material failure and resulting pressure
release can cause serious injury.
EXPLOSION HAZARD. AVOID INJURY. If flammable, corrosive or toxic gases
are cryopumped, a vent pipe must be connected to the relief valve or rupture disc
outlet. Vent to a safe location.
AVOID CONTAMINATION. When handling any vacuum surfaces, wear clean,
lint-free gloves to prevent contamination. If the surfaces of the cryopanels
become fingerprinted during unpacking or handling, clean them with a solvent
recommended for oil and grease removal in high-vacuum service.
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