Operation
Startup
The cryopump should be mounted to a gate valve attached to the vacuum chamber so that the
cryopump can be isolated and left running while the pressure in the main vacuum chamber
cycles from atmospheric to crossover pressure.
AVOID ASPHYXIATION. Be sure the work area is well ventilated.
EXPLOSION HAZARD. AVOID INJURY. Cryopumped gases are retained only
while the cryopump is cold. Cryopumped gases may be toxic, flammable or may
produce high pressures when the cryopump is warmed to ambient temperature.
EXPLOSION HAZARD. AVOID INJURY. Do not remove, modify, block or
restrict any pressure relief devices. Material failure and resulting pressure
release can cause serious injury.
EXPLOSION HAZARD. AVOID INJURY. If flammable, corrosive or toxic gases
are cryopumped, a vent pipe must be connected to the relief valve or the rupture
disc outlet. Vent to a safe location.
EXPLOSION HAZARD. AVOID INJURY. Provide a fail-safe, automatic
shutdown of all ignition sources when the cryopump shuts down. For example,
turn off ionization gauges and electric heaters.
AVOID INJURY. Establish safe handling procedures for cryopanels and louvers
that may hold toxic or radioactive gases. Contamination by some gases can
result in serious injury or death. See the Cryopump Handling and Shipping
procedure in the Maintenance section of this technical manual. Procedures in
this manual apply only to uncontaminated cryopumps.
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